Our ozone generators and extra-pure water supply equipment supplemented with ozone are being used for advanced processes for manufacturing materials used in electronic devices such as semiconductors, flat panel displays, and functional materials.

We have been responding to the ever-increasing demand for removal of particles and impurities and to requests for higher ozone concentrations through ongoing efforts to develop new products. Our high-concentration ozone generators are world leaders in this market and have been chosen by our customers for applications such as new oxide film deposition processes (such as ALD) and environment-friendly cleaning and photoresist stripping processes featuring reduced consumption of chemical solutions and ultra pure water.

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