What is MEMS?

● MEMS:Micro Electro Mechanical Systems
 ➢ A device manufactured as a three-dimensional mechanical structure by developing microfabrication technology developed and established in semiconductor production

● MEMS process
 ➢ Microfabrication process that integrated circuits (LSIs) did not require
 ➢Si deep etching technology (Si-DRIE)

● MEMS application example
 ➢ Gyro, accelerometer
 ➢ Inkjet printer nozzle
 ➢ Optical communication switch
 ➢ Elements for mobile phones

MEMS Business Overview at Sumitomo Precision Products

●Sumitomo Precision Products Co., Ltd.MEMS Solutions Department:
 ◆ We supply MEMS solutions that is World's most advanced, promote digital society・5G and contribute to achieve decarbonized society.
  ➢Click here for details (PDF) (Movie

●Sumitomo Precision Products Co., Ltd. MEMS Sensors and System department:
 ◆ MEMS element:
  ➢Design and development of MEMS gyro / accelerometer (*)
 ◆ Design and development of MEMS gyro / accelerometer application products (*)
  (*)Supports products sold by Silicon Sensing Systems below)

●Silicon Sensing Systems Co., Ltd.:
 ◆ Manufacture and sale of MEMS gyros and accelerometers
 ◆ Manufacture and sale of MEMS gyro / acceleration sensor application products
 ◆ Foundry service

●SPP Technologies Co., Ltd .:
 ◆ The top manufacturer of silicon deep etching equipment for producing MEMS elements. Film deposition equipment and other various semiconductor manufacturing equipment are also manufactured.

●Sumitomo Precision Products Co., Ltd. ICT Equipment & Devices Department:
 ◆Development of piezoelectric thin film technology:
  ➢High Figure of Merit (FOM) epi-PZT thin film development

Gyro History
  • Practical gyroscopes were commercialized one after another in the early 20th century. Silicon Sensing is the predecessor company of Sperry Gyroscope Company Ltd, which was established by E. Sperry in the United Kingdom in 1913, and has a history of designing and manufacturing gyroscopes for 100 years.
    In 1911, the first Sperry Gyro (unit number 100) was mounted on the cruise ship Princess Ann and made a test voyage from New York to Hampton Roads, Virginia. Unit 100, which returned to New York after the test voyage, was mounted on the US battleship Delaware.
    In 1914, Sperry's third son, Lawrence Sperry, succeeded in the world's first autopilot at a demonstration in Paris as a pilot. In addition, the gyro compass, which is not affected by hull materials, became popular as an important navigation instrument during World War I, replacing the magnetic compass. The Sperry-style gyro dominated the gyro compass market around the world, including Britain, France, Russia and Italy.
    In 1929, Jimmy Doolittle succeeded in the first instrument flight (Dead reckoning flight). E. Sperry has developed the first instrument flight panel that combines a gyroscope stabilizing sight, an aerial gyro compass, and an artificial horizontal radio beacon.
    Since then, it has been used for inertial navigation systems such as aircraft, ships, and submarines, attitude control devices, navigation devices, and high-speed stable control of trains.
    In 2001, the Silicon Sensing VSG-3 MEMS Gyro was adopted as the yaw rate sensor in the first Electronic Stability Control (ESC). In addition, the electric standing motorcycle Segway is equipped with a balance sensor assembly using VSG-3.
    In 2010, we announced CRM100 / 200 (PinPoint®) as a compact MEMS gyro for car navigation. The VSG-5 ring type silicon MEMS gyro which uses a PZT actuator for drive detection is adopted.
Inertial Sensors and Application Products

➢ Inertial Sensors
  ➢ Sensors that detect the acceleration and angular rate of moving bodies, the rotation of the earth, and gravity
➢ Application Products
  ➢Devices that provide information different from the physical output of the sensor, such as angle, velocity, and position, by performing calculations on the output of the inertial sensor.

Inertial Sensors and Application Products
Example in Use