Ozone Products for Semiconductor Field

Products introduction

Clean ozone generator

Sumitomo's ozone generator adopt the flat plate type discharging cell which convert oxygen to ozone by electric power. The discharging cell consists of high purity ceramics to prevent metal contaminations to the extremely low level. The ozone concentration is over 400g/㎥(N) which is at the top-class in the market. It has been highly regarded by many customers at dry and wet processes of semiconductor, FDP and other electronic device material manufacturing processes.

Application

  • Semiconductor device
  • Si/Compound wafer
  • FDP(LTPS, HTPS, TFT, Color filter, OLED)
  • Photomask
  • LED

GRC series

Specifications
Ozone gas flow rate 1L/min to 24L/min
[at 210g/m3(N)]
Ozone gas supply pressure max.0.2MPa
Cooling water temperature 20°C±2°C
Nitrogen doping ratio 0.1%(volume)against oxygen
Dimensions W483mm x D453mm x H266mm
Weight 30 to 45kg
Power 200-220VAC, 3-phase
Features
High concentration; Up to 400g/m3(N)
19 inch rack size standard model
Abundant product line up; Small to large capacity
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA
Performance curve
GRC series performance curve
GRC series
Vertical type

GRP series

Specifications
Ozone gas flow rate 1.5L/min to 5L/min
[at 350g/m3(N)]
Ozone gas supply pressure max.0.3MPa
Cooling water temperature 20°C±2°C
Nitrogen doping ratio 0.1%(volume)against oxygen
Dimensions W483mm x D453mm x H266mm
Weight 30 to 40kg
Power 200-220VAC, 3-phase
Features
High concentration; Up to 400g/m3(N), High pressure; max.0.3MPa
19 inch rack size standard model
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA
Performance curve
GRP series performance curve
GRP series Vertical type

GRF series

Specifications
Ozone gas flow rate 1L/min to 24L/min
[at 210g/m3(N)]
Ozone gas supply pressure max.0.15MPa
Cooling water temperature 20°C±2°C
Dimensions W483mm x D453mm x H266mm
Weight 30 to 45kg
Power 200-220VAC, 3-phase
Features
High concentration; Up to 400g/m3(N) without nitrogen doping
19 inch rack size standard model
Abundant product line up; Small to large capacity
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA
Performance curve
GRF series performance curve
GRF series Vertical type

SGVP series

Specifications
Ozone gas flow rate 1.6L/min [at 210g/m3(N)]
Ozone gas supply pressure max.0.3MPa
Cooling water temperature 20°C±2°C
Dimensions W210mm x D350mm x H500mm
Weight 17kg
Power 200-220VAC/100-110VAC, 1-phase
Features
High concentration; Up to 400g/m3(N), High pressure; max.0.3MPa
Build in type small unit at low price with less functions
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Performance curve
SGVP-440 performance curve
SGVP-440

SGRC/SGRP/SGRF series

Specification of equipment example 1(SGRP-03JS)
Ozone concentration 350g/m3(N)
Ozone gas flow rate 15L/min (5L/min x 3Line)
Cooling water temperature 20°C±2°C
Dimensions W570mm x D850mm x H1,870mm
Weight 360kg
Power 200-220VAC, 3-phase
Specification of equipment example 2(SGRF-03JA)
Ozone concentration 400g/m3(N)
Ozone gas flow rate 20L/min
Cooling water temperature 5°C
Dimensions W570mm x D850mm x H1,836mm
Weight 350kg
Power 200-220VAC, 3-phase
Features
Capable of supplying either large capacity ozone gas with one line or multi lines by individual control
High concentration; Up to 400g/m3(N)
Abundant product line up; Small to large capacity.
High pressure; max.0.3MPa(SGRP series)
Nitrogen doping free(SGRF series)
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA
Performance curve
SGRF-03XA Performance curve
SGRP-03JS

SG-HE series

Specifications
Ozone gas flow rate 4L/min to 14L/min [210g/m3(N)]
Cooling water temperature 20°C±2°C
Dimensions W450mm x D600mm x H1,030mm
Weight 100 to 110kg
Power 200-220VAC, 3-phase
Features
Stand alone type with gas flow and pressure sensors inside
Abundant product line up; Small to large capacity
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
Piping material; Select from 316LSS or PFA
Performance curve
SG-HE series performance curve
SG-HE series


Large flow type (SGU Series)

Specifications
Ozone gas concentration 300g/㎥(N)
Ozone gas flow rate 140L/min、175L/min、210L/min(200g/㎥(N))
Dimensions W700×D900×H2,154 (140L/min)
Cooling water temperature 20±2℃
Cooling water flow rater >48L/min
Power AC200V 3-phase
Features
High flow capacity; Up to 210 L/min
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
Applications
ALD
SGU

High concentration type

Specifications
Ozone gas concentration 400g/㎥(N)
Ozone gas concentration 20L/min
Dimensions W600×D810×H1,850
Cooling water temperature for chiller 30L/min (@20℃)
Power AC200V 3-phase
Features
High concentration; Up to 400g/㎥(N)
Small footprint, built-in miniaturized chiller
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by integrated with ozone monitor(Closed-loop control)
Features
ALD

GR Series multi-unit

Specifications
Ozone gas concentration 210g/㎥(N)
Ozone gas concentration 1L/min~14L/min
Dimensions W483× H266× D454
Cooling water temperature 20±2℃
Cooling water flow rater 1~10L/min
Power AC200V 3-phase
Features
19inch rack size standard model
Gas flow and pressure sensors inside
19 inch ruck size
Stable concentration by integrated with ozone monitor(Closed-loop control)
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Applications
Wet and dry processes for semiconductor, FDP and other electric device material manufacturing processes
GR



Ozonized ultra pure water generator

Sumitomo ozonized ultra pure water generator consists of Sumitomo's clean ozone generator and ozone dissolution tool to dissolve ozone gas in ultra pure water. Preventing particles and metal contaminations, it has been highly regarded by many customers at the processes of organic removal and surface treatment of semiconductor, FDP and other electronic device material manufacturing processes.


Stand alone type

Specifications
Dissolved ozone concentration 5 to 150ppm
Ozonized ultra pure water flow rate 1 to 90L/min
Ozonized ultra pure water pressure supply max.0.25MPa
Feed gas Oxygen, Nitrogen, Carbon dioxide
Power 200-220VAC, 3-phase
Features
High concentration, Large flow rate
Small footprint, Compact
Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell)
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Stable concentration by intergrated with ozone monitor (Closed-loop control)
CE, NRTL, SEMI standard applicable
Maintenance free during shut off
NOx free ozonized water
Ozonized water performance curve(SGX-1G21SNC)
Ozonized water performance curve
SGX-1G21SNC

Separate type

Specifications
Dissolved ozone concentration 5 to 150ppm
Ozonized ultra pure water flow rate 1 to 90L/min
Feed gas Oxygen, Nitrogen, Carbon dioxide
Power 200-220VAC, 3-phase
Features
Installation of the ozone dissolution units close to the use point enables it to prevent the decay of dissolved ozone concentration during the transport in the piping.
Contribute to reduction of foot print.(One ozone generator supplies ozone gas to multi dissolution units.)
High concentration, Large flow rate
Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell)
High pressure tolerance, Long life cycle discharging cell
Stable concentration(Closed-loop control)
Maintenance free during shut off
NOx free ozonized water
Design for 1 by N
Design example for 1 by 3
SGX-1G21SNC

Variable flow type

Specifications
Dissolved ozone concentration 5 to 30ppm
Ozonized ultra pure water flow rate 1 to 60L/min
Feed gas Oxygen, Carbon dioxide
Power 200-220VAC, 3-phase
Features
Variable flow rate according the required flow rate. (Reduction of ultra pure water consumption)
Multi chamber supply
Quick response by adopting the ejector dissolution method.
Stable concentrationby intergrated with ozone monitor (Closed-loop control)
NOx free ozonized water
Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell)
High pressure tolerance, Long life cycle discharging cell
Maintenance free during shut off
SGXF


Ozone destructor / Dissolued ozone destvustor

Specification
Designed according to the requirement
Customizable functionality such as interlocks
Features
Low running cost(No power supply, Long life cycle)
Destruction of high concentration ozone
Easy maintenance(Disposable as industrial wastes)

Ozone monitor


Specification
We are open to offer to measure concentration of ozone gas or dissolved ozone


Environmental Systems
Sales and Marketing Departmant
Semiconductor Euipment Sales Group

1-10, Fuso-cho, Amagasaki, Hyogo, 660-0891 Japan

TEL : +81-6-6489-5943
FAX : +81-6-6489-5849