Products introduction
Clean ozone generator
Sumitomo's ozone generator adopt the flat plate type discharging cell which convert oxygen to ozone by electric power. The discharging cell consists of high purity ceramics to prevent metal contaminations to the extremely low level. The ozone concentration is over 400g/m3(N) which is at the top-class in the market. It has been highly regarded by many customers at dry and wet processes of semiconductor, FPD and other electronic device material manufacturing processes.
Application
- Semiconductor device
- Si/Compound wafer
- FPD(LTPS, HTPS, TFT, Color filter, OLED)
- Photomask
- LED
GRC series
| Specifications |
| Ozone gas flow rate |
1L/min to 24L/min
[at 210g/m3(N)] |
| Ozone gas supply pressure |
max.0.2MPa |
| Cooling water temperature |
20°C±2°C |
| Nitrogen doping ratio |
0.1%(volume)against oxygen |
| Dimensions |
W483mm x D453mm x H266mm |
| Weight |
30 to 45kg |
| Power |
200-220VAC, 3-phase |
| Features |
| High concentration; Up to 400g/m3(N) |
| 19 inch rack size standard model |
| Abundant product line up; Small to large capacity |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
| CE, NRTL, SEMI standard applicable |
| Piping material; Select from 316LSS or PFA |
Performance curve
GRP series
| Specifications |
| Ozone gas flow rate |
1.5L/min to 5L/min
[at 350g/m3(N)] |
| Ozone gas supply pressure |
max.0.3MPa |
| Cooling water temperature |
20°C±2°C |
| Nitrogen doping ratio |
0.1%(volume)against oxygen |
| Dimensions |
W483mm x D453mm x H266mm |
| Weight |
30 to 40kg |
| Power |
200-220VAC, 3-phase |
| Features |
| High concentration; Up to 400g/m3(N), High pressure; max.0.3MPa |
| 19 inch rack size standard model |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
| CE, NRTL, SEMI standard applicable |
| Piping material; Select from 316LSS or PFA |
Performance curve
GRF series
| Specifications |
| Ozone gas flow rate |
1L/min to 24L/min
[at 210g/m3(N)] |
| Ozone gas supply pressure |
max.0.15MPa |
| Cooling water temperature |
20°C±2°C |
| Dimensions |
W483mm x D453mm x H266mm |
| Weight |
30 to 45kg |
| Power |
200-220VAC, 3-phase |
| Features |
| High concentration; Up to 400g/m3(N) without nitrogen doping |
| 19 inch rack size standard model |
| Abundant product line up; Small to large capacity |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
| CE, NRTL, SEMI standard applicable |
| Piping material; Select from 316LSS or PFA |
Performance curve
SGRC/SGRP/SGRF series
| Specification of equipment example 1(SGRP-03JS) |
| Ozone concentration |
350g/m3(N) |
| Ozone gas flow rate |
15L/min
(5L/min x 3Line) |
| Cooling water temperature |
20°C±2°C |
| Dimensions |
W570mm x D850mm x H1,870mm |
| Weight |
360kg |
| Power |
200-220VAC, 3-phase |
| Specification of equipment example 2(SGRF-03JA) |
| Ozone concentration |
400g/m3(N) |
| Ozone gas flow rate |
20L/min |
| Cooling water temperature |
5°C |
| Dimensions |
W570mm x D850mm x H1,836mm |
| Weight |
350kg |
| Power |
200-220VAC, 3-phase |
| Features |
| Capable of supplying either large capacity ozone gas with one line or multi lines by individual control |
| High concentration; Up to 400g/m3(N) |
| Abundant product line up; Small to large capacity. |
| High pressure; max.0.3MPa(SGRP series) |
| Nitrogen doping free(SGRF series) |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
| CE, NRTL, SEMI standard applicable |
| Piping material; Select from 316LSS or PFA |
Performance curve
SG-HE series
| Specifications |
| Ozone gas flow rate |
4L/min to 14L/min [210g/m3(N)] |
| Cooling water temperature |
20°C±2°C |
| Dimensions |
W450mm x D600mm x H1,030mm |
| Weight |
100 to 110kg |
| Power |
200-220VAC, 3-phase |
| Features |
| Stand alone type with gas flow and pressure sensors inside |
| Abundant product line up; Small to large capacity |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
| Piping material; Select from 316LSS or PFA |
Performance curve
SGU Series(Large flow type)
| Specifications |
| Ozone gas concentration |
300g/m3(N) |
| Ozone gas flow rate |
140L/min、175L/min、210L/min（200g/m3(N)) |
| Dimensions |
W700×D900×H2,154 (140L/min) |
| Cooling water temperature |
20±2℃ |
| Cooling water flow rater |
>48L/min |
| Power |
AC200V 3-phase |
| Features |
| High flow capacity; Up to 210 L/min |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
High concentration type
| Specifications |
| Ozone gas concentration |
400g/m3(N) |
| Ozone gas concentration |
20L/min |
| Dimensions |
W600×D810×H1,850 |
| Cooling water temperature for chiller
|
30L/min (@20℃) |
| Power |
AC200V 3-phase |
| Features
|
| High concentration; Up to 400g/㎥(N) |
| Small footprint, built-in miniaturized chiller |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by integrated with ozone monitor(Closed-loop control) |
All in one GRF Series
| Specifications |
| Ozone gas concentration |
210g/m3(N) |
| Ozone gas concentration |
1L/min～14L/min |
| Dimensions |
W483× H266× D454 |
| Cooling water temperature |
20±2℃ |
| Cooling water flow rater |
1～10L/min |
| Power |
AC200V 3-phase |
| Features |
| 19inch rack size standard model |
| Gas flow and pressure sensors inside |
| 19 inch ruck size |
| Stable concentration by integrated with ozone monitor(Closed-loop control)
|
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Applications |
| Wet and dry processes for semiconductor, FPD and other electric device material manufacturing processes |
Ozonized ultra pure water generator
Sumitomo ozonized ultra pure water generator consists of Sumitomo's clean ozone generator and ozone dissolution tool to dissolve ozone gas in ultra pure water. Preventing particles and metal contaminations, it has been highly regarded by many customers at the processes of organic removal and surface treatment of semiconductor, FPD and other electronic device material manufacturing processes.
Stand alone type
| Specifications |
| Dissolved ozone concentration |
5 to 100ppm |
| Ozonized ultra pure water flow rate |
1 to 120L/min |
| Ozonized ultra pure water pressure supply |
max.0.25MPa |
| Feed gas |
Oxygen, Carbon
dioxide |
| Power |
200-220VAC, 3-phase |
| Features |
| High concentration, Large flow rate |
| Small footprint, Compact |
| Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell) |
| High pressure tolerance, Long life cycle discharging cell |
| Quick start-up, Quick response |
| Stable concentration by intergrated with ozone monitor (Closed-loop control) |
| CE, NRTL, SEMI standard applicable |
| Maintenance free during shut off |
| NOx free ozonized water |
Ozonized water performance curve(SGX-1G21SNC)
Separate type
| Specifications |
| Dissolved ozone concentration |
5 to 150ppm |
| Ozonized ultra pure water flow rate |
1 to 90L/min |
| Feed gas |
Oxygen, Carbon
dioxide |
| Power |
200-220VAC, 3-phase |
| Features |
| Installation of the ozone dissolution units close to the use point enables it to prevent the decay of dissolved ozone concentration during the transport in the piping. |
| Contribute to reduction of foot print.(One ozone generator supplies ozone gas to multi dissolution units.) |
| High concentration, Large flow rate |
| Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell) |
| High pressure tolerance, Long life cycle discharging cell |
| Stable concentration(Closed-loop control) |
| Maintenance free during shut off |
| NOx free ozonized water |
Design for 1 by N
Variable flow type
| Specifications |
| Dissolved ozone concentration |
5 to 30ppm |
| Ozonized ultra pure water flow rate |
1 to 60L/min |
| Feed gas |
Oxygen, Carbon dioxide |
| Power |
200-220VAC, 3-phase |
| Features |
| Variable flow rate according the required flow rate. (Reduction of ultra pure water consumption) |
| Multi chamber supply |
| Quick response by adopting the ejector dissolution method. |
| Stable concentrationby intergrated with ozone monitor (Closed-loop control) |
| NOx free ozonized water |
| Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell) |
| High pressure tolerance, Long life cycle discharging cell |
| Maintenance free during shut off |
Ozone destructor / Dissolued ozone destvustor
| Specification |
| Designed according to the requirement |
| Customizable functionality such as interlocks |
| Features |
| Low running cost(No power supply, Long life cycle) |
| Destruction of high concentration ozone |
| Easy maintenance(Disposable as industrial wastes) |
Ozone monitor
| Specification |
| We are open to offer to measure concentration of ozone gas or dissolved ozone |
Ozone Department
Sales&Marketing Group
Semiconductor Equipment
1-10, Fuso-cho, Amagasaki, Hyogo, 660-0891
Japan
TEL : +81-6-6489-5943
FAX : +81-6-6489-5849
