For semiconductor manufacturing

Products 

Clean ozone generator

Sumitomo's ozone generator adopt the flat plate type discharging cell which convert oxygen to ozone by electric power. 
The discharging cell consists of high purity ceramics to prevent metal contaminations to the extremely low level. The ozone concentration is over400g/m3(N)which is at the top-class in the market. 
It has been highly regarded by many customers at dry and wet processes of semiconductor, FPD and other electronic device material manufacturing processes.

Application

  • Semiconductor device
  • Si/Compound wafer
  • FPD(LTPS, HTPS, TFT, Color filter, OLED)
  • Photomask
  • LED

GRC series

Specification
Ozone gas flow rate 1L/min~24L/min
(at 210g/m3)3(N)〕
Ozone gas supply pressure max.0.2MPa
Cooling water temperature 20℃±2℃
Nitrogen doping ratio 0.1%(volume)against oxygen
Dimensions W483mm×D453mm×H266mm
weight 30~45kg
Power 200-220VAC, 3-phase
Features
High concentration; Up to 400g/m3(N)400g/m3(N)
19 inch rack size standard model
Abundant product line up; Small to large capacity
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA

GRCシリーズ流量特性
GRC series
※縦型ユニットもございます

GRP series

Specification
Ozone gas flow rate 1.5L/min to 5L/min (at350g/m3)3(N)〕
Ozone gas supply pressure max.0.3MPa
Cooling water temperature 20℃±2℃
Nitrogen doping ratio 0.1%(volume)against oxygen
Dimensions W483mm×D453mm×H266mm
weight 30~40kg
Power 200-220VAC, 3-phase
Features
High concentration; Up to400g/m3(N)、, High pressure; max.0.3MPa
19 inch rack size standard model
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA

GRPシリーズ流量特性
GRシリーズ ※縦型ユニットもございます

GRF series

Specification
Ozone gas flow rate 1L/min to 24L/min〔at210g/m3(N)〕
Ozone gas supply pressure max.0.15MPa
Cooling water temperature 20℃±2℃
Dimensions W483mm×D453mm×H266mm
weight 30~45kg
Power 200-220VAC, 3-phase
Features
High concentration; Up to400g/m3(N) without nitrogen doping
19 inch rack size standard model
Abundant product line up; Small to large capacity
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA

GRFシリーズ流量特性
GRF series ※縦型ユニットもございます

SGRC/SGRP/SGRF series


Specification of equipment example 1(SGRP-03JS)
Ozone concentration 350g/m3(N)
Ozone gas flow rate 15L/min《5L/min×3Line》
Cooling water temperature 20℃±2℃
Dimensions W570mm×D850mm×H1,870mm
weight 360kg
Power 200-220VAC, 3-phase
Specification of equipment example 2(SGRF-03JA)
Ozone concentration 400g/m3(N)
Ozone gas flow rate 20L/min
Cooling water temperature 5℃
Dimensions W570mm×D850mm×H1,836mm
weight 350kg
Power 200-220VAC, 3-phase
Features
Equipped with the GRC/GRP/GRF series, it can be customized to meet customer needs, such as for large flow rates and multi-gas supply.
Built-in ozone concentration meter provides excellent concentration stability (feedback control)
CE, NRTL, SEMI standard applicable
Piping material; Select from 316LSS or PFA

SGRF-03XA流量特性
SGRP-03JS

SG-HE series

Specification
Ozone gas flow rate 4L/min ~ 14L/min [at 210g/m 3 (N)]
Cooling water temperature 20℃±2℃
Dimensions W450mm×D600mm×H1,030mm
weight 100~110kg
Power 200-220VAC, 3-phase
Features
Stand alone type with gas flow and pressure sensors inside
Abundant product line up; Small to large capacity
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
Piping material; Select from 316LSS or PFA

SG-HEシリーズ流量特性
SG-HE series

SGU Series(Large flow type)

Specifications
Ozone concentration 300g/m3(N)
Ozone gas flow rate 140L/min、175L/min、210L/min(200g/m3(N))
Dimensions W700×D900×H2,154 (140L/min)
Cooling water temperature 20±2℃
Cooling water flow rater >48L/min
Power AC200V 3-phase
Features
High flow capacity; Up to 210 L/min
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
Purpose
ALD
SGUシリーズ

High concentration type

Specification
Ozone concentration 400g/m3(N)
Ozone gas flow rate 20L/min
Dimensions W600×D810×H1,850
Cooling water temperature for chiller 30L/min (at water temperature 20℃)
Power 200-220VAC, 3-phase
Features
High concentration; Up to 400g/m3(N)
Small footprint, built-in miniaturized chiller
Equipped with a water-cooled chiller
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
Purpose
ALD

All in one GRF Series

Specifications
Ozone concentration 210g/m3(N)
Ozone gas flow rate 1L/min~14L/min
Dimensions W483× H266× D454
Cooling water temperature 20±2℃
Cooling water flow rater 1~10L/min
Power 200-220VAC, 3-phase
Features
19 inch rack size standard model
Gas flow and pressure sensors inside
19 inch ruck size
Stable concentration by integrated with ozone monitor(Closed-loop control)
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
Purpose
Wet and dry processes for semiconductor, FPD and other electric device material manufacturing processes
GRシリーズ



Ozonized ultra pure water generator

Sumitomo ozonized ultra pure water generator consists of Sumitomo's clean ozone generator and ozone dissolution tool to dissolve ozone gas in ultra pure water. Preventing particles and metal contaminations, it has been highly regarded by many customers at the processes of organic removal and surface treatment of semiconductor, FPD and other electronic device material manufacturing processes.

Application

  • Semiconductor device
  • Si/Compound wafer
  • FPD(LTPS, HTPS, TFT, Color filter, OLED)
  • Photomask
  • HDD

SGX Series

Stand alone type

Specification
Dissolved ozone concentration 5~100ppm
Ozonized ultra pure water flow rate 1~120L/min
Ozonized ultra pure water pressure supply max.0.25MPa
Feed gas Oxygen, Carbon dioxide
Power 200-220VAC, 3-phase
Features
High concentration, Large flow rate
Small footprint, built-in miniaturized chiller
Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell)
High pressure tolerance, Long life cycle discharging cell
Quick start-up, Quick response
19 inch ruck size
CE, NRTL, SEMI standard applicable
Maintenance free during shut off
NOx free ozonized water

SGX-1G21SNCオゾン水流量特性
SGX-1G21SNC

Separate type

Specification
Dissolved ozone concentration 5~150ppm
Ozonized ultra pure water flow rate 1~90L/min
Feed gas Oxygen, Carbon dioxide
Power 200-220VAC, 3-phase
Features
Installation of the ozone dissolution units close to the use point enables it to prevent the decay of dissolved ozone concentration during the transport in the piping.
Contribute to reduction of foot print.(One ozone generator supplies ozone gas to multi dissolution units.)
High concentration, Large flow rate
Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell)
High pressure tolerance, Long life cycle discharging cell
19 inch ruck size
Maintenance free during shut off
NOx free ozonized water
1 by N design
1 by 3 設計例
SGX-1G21SNC

Variable flow type

Specification
Dissolved ozone concentration 5~30ppm
Ozonized ultra pure water flow rate 1~60L/min
Feed gas Oxygen, Carbon dioxide
Power 200-220VAC, 3-phase
Features
Variable flow rate according the required flow rate. (Reduction of ultra pure water consumption)
Multi chamber supply
Quick response by adopting the ejector dissolution method.
19 inch ruck size
NOx free ozonized water
Low running cost(Low power consumption, Small number of consumable parts, Long life cycle discharging cell)
High pressure tolerance, Long life cycle discharging cell
Maintenance free during shut off
SGXF


Ozone destructor / Dissolued ozone destvustor


Specification
Designed according to the requirement
Customizable functionality such as interlocks
Features
Low running cost(No power supply, Long life cycle)
Destruction of high concentration ozone
Easy maintenance(Disposable as industrial wastes)

Ozone concentration meter

This device measures the concentration of generated ozone gas and ozone water.

We also accept sales of ozone concentration meters alone.
We accept consultations regarding the measurement of ozone gas and ozone water concentrations.