Piezoelectric Thin Film
Our lead zirconate titanate (PZT) thin films manufactured for piezoelectric MEMS gyroscopes achieve an excellent figure-of-merit (FOM) and high reliability. And in 2020, our MEMS Foundry Services business expanded its 8-inch lineup of piezoelectric MEMS and now provides services worldwide.
PZT piezoelectric thin film lineup
MEMS Infinity offers PZT piezoelectric films with characteristics tailored to each application.
Based on the PZT thin film that has been mass-produced in our own gyroscope CRM and CMS series, we can handle everything from film deposition to device processing.
MEMS actuator applications
High piezoelectric index d31(PZT-O*))
MEMS sensor applications
Low dielectric constant εr(PZT-A*))
MEMS transducer applications
Balanced type with both low εrand high d31(PZT-B*))
*) PZT-O is a Poly film, and PZT-A and PZT-B are both Epi films, but A and B have different composition ratios.
| PZT-O | PZT-A・PZT-B | |
| Piezoelectric constant d31(pm/V) | 210 ~ 240 | 150 ~ 200 |
|---|---|---|
| Relative permittivity εr | ~ 900 | 260 ~ 500 |
| Film thickness (μm) | 1 ~ 5 | 2 (standard) |
| others | Low stress +30MPa | High FOM*) > 50GPa |
Polycrystalline PZT film, which exhibits a high piezoelectric constant, has been used in a variety of applications including actuators, and has been sold for over 10 years, and has mass-produced over 3 million piezoelectric gyroscopes in-house.
Based on our past experience, we have newly developed a new PZT epitaxial film. Compared to conventional products, the relative dielectric constant has been significantly reduced while suppressing a decrease in the piezoelectric constant. This piezoelectric film is mainly suitable for transducer and sensor applications.
Contact Us
