FAQ

MEMS

What is MEMS?

MEMS stands for Micro Electro Mechanical Systems. They are devices made by utilizing and advancing the microfabrication technology that has been developed and established for the production of semiconductors on Si wafers. However, instead of two-dimensional integrated circuits (LSI), MEMS devices have a three-dimensional mechanical structure.

Gyro

What are the operating principles of a MEMS gyro?

The MEMS gyros from Sumitomo Precision Products are what is called the vibration type. There is primary vibration on ring-shaped silicon vibrators in the directions of 0, 90,180 and 270 degrees. When an angular velocity (rotation) is applied in that state, a secondary vibration that is proportional to the angular velocity occurs in the direction that is 45 degrees from the primary vibration. That secondary vibration is read to measure the angular velocity.

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The acceleration sensor operates on the principle that the weight suspended on the spring will be displaced. When the object the sensor is attached to accelerates, the suspended weight remains stationary due to inertia. The springs expand and contract and this is detected and the corresponding force is generated. This expansion and contraction is detected by the change in the static capacitance between the movable electrode and opposing fixed electrode in a comb electrode made from silicon.

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On our gyroscope, a silicon ring type resonator is resonated and vibrated to form an ellipse, and the angular velocity is obtained based on the Coriolis force that is generated there. A typical MEMS gyro has the advantage of being small and inexpensive, but when vibration such as that due to an external impact occurs, the resonant vibration can be disturbed by the external vibration and result in an incorrect output. In contrast with this, when a ring shape is used, the disturbance to the vibration of the ring due to the external vibration is very small, so this type is superior against vibration and impacts.

A characteristic of our gyro is that even when measurements are continued for a long time, the angular deviation is small. In order to give the product that characteristic, inventions unique to our company were used in the MEMS design to reduce various errors.

The MEMS gyros from our company have a unique ring shape which gives them vibration resisting performance that is of the highest level among MEMS gyros.

On RLG (Ring Laser Gyros) and FOG (Fiber Optic Gyros), the angular velocity is detected by using the phase shifts in the light traveling in opposite directions over a certain optical path length. RLG and FOG are very accurate, but they are very complex, so they are relatively large and expensive to manufacture. Semiconductor processes are applied to produce MEMS gyros, so they are very small and can be manufactured in large quantities. As a result of this, it is possible to manufacture them at a lower cost than gyros that use light. In addition, the MEMS structure is very small, and there are no elements that require a large amount of power, such as a laser, so a MEMS gyro can operate at 1/10 the power consumption of a gyro that uses light.

Any type of sensor will have a zero point error for the physical quantity (true value) being sensed. Bias is the error that occurs when the target physical quantity is zero.

Drift refers to the sensor output changing over time. Drift may occur with a time constant of a few seconds to a few minutes after the sensor power supply is turned on, or may occur in units of several months.

This device is used to detect the movement of objects, so it can be used for the purpose of detecting the movement of moving objects. In addition, NorthFinder™ can also detect the azimuth angle in environments where GNSS signals cannot be received, so it can be used as an optimal substitute for GNSS in environments such as underground and underwater.

The gyros are manufactured within the grounds of the Sumitomo Precision Products Head Office by Silicon Sensing Systems, which is a joint venture with Collins Aerospace.

Applied Products

How can an angle be measured with a gyro?

The gyro outputs the angular velocity, in other words, the angle per unit of time. It is therefore possible to calculate the angle by time integrating the angular velocity. In addition, it can also track fast motion, so it is better at outputting the angle in real time than an inclinometer using an acceleration sensor. Our gyros only have low bias and low drift, so they provide the customer with accurate angles.

It is obtained by measuring the rotation axis of the Earth with the gyro. True north and the axis of rotation are almost the same.

Magnetic north is obtained by measuring geomagnetism with a magnetic sensor. In the central area of Japan, it differs from true north by about 7 degrees.

The attitude angle is the inclination of the object relative to the plane containing the X and Y axes perpendicular to the Earth's gravitational axis (Z axis).

The azimuth angle is the angle about the Earth's gravitational axis, which is perpendicular to the XY plane. There is the relative azimuth angle, in which the initial azimuth angle the equipment is pointing in when it is switched on is taken as zero degrees, and the absolute azimuth angle, in which the true north (North Pole) direction is taken as zero degrees. All products can measure the relative azimuth angle, but the NorthFinder™ products can also measure the absolute azimuth angle.

IMU stands for Inertial Measurement Unit, which is a device that outputs the angular velocity and acceleration of the X, Y, and Z3 axes. Most products compensate for X, Y and Z axis orthogonal deviation and deviation due to temperature.

VG stands for Vertical Gyro, which is a device that outputs attitude angle and relative azimuth angle.

AHRS stands for Attitude Heading Reference System, which is a device that outputs attitude angle and absolute azimuth angle.

INS stands for Inertial Navigation System, which is a device that outputs speed and travel distance in addition to the functions of AHRS. INS devices include pure inertia INS and GNSS assisted INS.

On RLG (Ring Laser Gyros) and FOG (Fiber Optic Gyros), the angular velocity is detected by using the phase shifts in the light traveling in opposite directions over a certain optical path length. RLG and FOG are very accurate, but they are very complex, so they are relatively large and expensive to manufacture. MEMS gyros apply semiconductor processes, so they are very small and mass production is possible. As a result of this, it is possible to manufacture them at a lower cost than gyros that use light. In addition, the MEMS structure is very small, and there are no elements that require a large amount of power, such as a laser, so a MEMS gyro can operate at 1/10 the power consumption of a gyro that uses light.

Depending on the output format of the product, connection is possible if items such as a serial communication board are prepared. If you have any questions, please contact us via the inquiry form.

Some have been prepared for some products.

If the substrate components of the GNSS and the gyros are separated, they can be housed in the same housing.

Even in a product that has an IMU function in one chip, the X, Y, and Z axis elements are arranged independently inside the chip, and the accuracy of the Z axis element in particular is relatively poor. In our gyros, in order to give the products their characteristic high accuracy in any position, the IMU is composed of independent gyros with the same structure in all of the X, Y, and Z axes. This makes the size larger than IMU in one chip, but they are characterized by high accuracy.

This may be necessary, depending on the use. For details, please contact us via the inquiry form.

Basically, our products do not have a waterproof structure, so the customer should take the waterproofing action necessary.

Use is not possible near to the North Pole or the South Pole because the error becomes large.

Use overseas is possible.

MEMS gyros have an initial output change that is called warm-up drift. Each product has an output signal that indicates the stable state after the warm-up, so please use it as a guide.

Various information is output in addition to angular velocity, acceleration, attitude angle and azimuth angle. Please check the product data sheet for details.

ISO documents are not issued for the calibration unique to our company.

This varies depending on the use. For details, please contact us via the inquiry form.

It is not possible to measure the axis of rotation of the Earth with the gyro, so we ask that it is established in a stationary state.

On our gyroscope, a silicon ring type resonator is resonated and vibrated to form an ellipse, and the angular velocity is obtained based on the Coriolis force that is generated there. A typical MEMS gyro has the advantage of being small and inexpensive, but when vibration such as that due to an external impact occurs, the resonant vibration can be disturbed by the external vibration and result in an incorrect output. In contrast with this, when a ring shape is used, the disturbance to the vibration of the ring due to the external vibration is very small, so this type is superior against vibration and impacts. In addition, on the applied products that use the gyro, in order to make the most of the characteristics of a gyro, in addition to the characteristics explained above, the products are also characterized by the use of proprietary algorithms of our company that mean that even with a MEMS gyro, it is possible to detect true north by measuring the rotational angular velocity of the Earth. A characteristic obtained by using the MEMS type is that the power consumed is 1/10 that consumed by other gyrocompasses. This is a great advantage, particularly when a product is powered by a battery.

Positioning by GNSS can only be performed when a signal is received from GNSS satellites. When positioning is performed by GNSS alone, positioning becomes impossible when the signals from satellites are interrupted, such as where there are many obstacles in an area of high-rise buildings, and where the signal is interrupted underground and in tunnels.
By performing the calculation processing in combination with information from various sensors such as the gyro and acceleration sensors, it becomes possible to perform the positioning with high accuracy, even when in an environment where it would be difficult to continue positioning by GNSS alone.

It is possible. However, the communication distance specified by each radio standard is the maximum value, and the distance will also vary depending on the actual situation.

If a signal is to be transmitted, there is the method of converting it to light by using a photocoupler. However, a photocoupler cannot transmit power.
One of the advantages of using a photocoupler is that it is not necessary to have a common GND level, so operation is possible even if the sensor head side and the monitor side are different power supply systems. However, there are limits to the frequencies that can be followed by a photocoupler, so caution is required when transmitting high-speed digital signals. We do not think there will be any problems with the transmission of the azimuth angle, attitude angle, angular velocity, acceleration and position.

The product is currently under development and has not yet been adopted, but the development is being advanced with the intention of obtaining type certification.

Coordination regarding the rental period is required, but the renting of samples is possible.

Others

Purchasing overseas is possible.

Our company will conduct the repairs if we judge that repair is possible.

Please check the data sheet and make your own judgment on this.

This product does not correspond to navigation equipment or a gyroscope under the Wassenaar Arrangement and is not subject to export regulations, but proper export control by the customer is necessary. It is also an ITAR-free product.

Please contact us via the inquiry form.

Please consult us.

Either contact your sales representative directly or contact us via the inquiry form.