Strengths of the MEMS Device Division

• Compact and highly accurate MEMS gyro sensor

MEMS Gyro Sensor Business

Since 1999, our joint venture, Silicon Sensing Systems, has been mass-producing MEMS gyro sensors. They have been adopted for applications such as automobile anti-skid devices and have been highly acclaimed, but are now expanding into the miniaturization and high-precision markets. They are active in a wide range of applications, including attitude control systems and safety systems for various mobile vehicles, such as bipedal robots, autonomous helicopters, GPS antennas, and artificial satellites.
We are also working on application systems incorporating these gyro sensors (small attitude sensor units, Northfinders) and new devices that utilize MEMS technology.

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  • Piezoelectric thin film MEMS gyro sensor
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  • High-precision MEMS gyro sensor
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  • Piezoelectric thin film IMU
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  • High precision IMU

*IMU (Inertial Measurement Unit): 6-axis inertial measurement unit

Inertial sensor application products

Our product is designed to detect motion information by mechanically vibrating a silicon ring-shaped vibrator. This structure enables high accuracy that is difficult to achieve with other companies' products, and we have been conducting research to improve accuracy since around 2010. MEMS gyroscopes that have achieved high accuracy are already being used for attitude control of space rockets and guidance control for route navigation. Compared to the previously used ring laser type, this product is lighter, consumes less power, and has significantly lower manufacturing costs, so further demand is expected in fields such as aerospace, shipping, railways, and resource mining.
We will continue to develop and manufacture a variety of products by applying the technology we have cultivated so far.

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  • Northfinder™ Attitude and Heading Reference System (AHRS)
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  • Attitude angle detection gyro device AAU-11
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  • Compact redundant inertial sensor MRN-01-SS (IMU)