Toward a promising future
Our company possesses development and product deployment technologies that cover every stage of MEMS device design, prototyping, and mass production, and our key feature is our ability to realize product development in a one-stop manner. As a MEMS foundry, we provide services from sputter deposition to device processing based on PZT thin films, for which we have a proven track record of mass production. Furthermore, in Si deep etching (DRIE), we achieve world-class high selectivity and high etch rates while optimizing perpendicularity, sidewall roughness, and CD loss.
Furthermore, we thoroughly implement quality control based on ISO 9001 certification in providing these technologies, ensuring that our customers' projects are supported with reliable quality.
MEMS Device Design
We provide development support to bring our customers' product ideas to life, from structural design and simulation to process design of MEMS devices.
MEMS Foundry Development
We support prototyping and small-batch development, including process condition verification and optimization. We assist development with mass production in mind.
MEMS Foundry Mass Production
Our established MEMS manufacturing processes ensure consistent quality and support for mass production. We can handle everything from small-lot production to full-scale mass production.
1992年
MEMS Manufacturing equipment, IX200 on sale.
Customer Lab established.
IX200 were supplied for MEMS development inside and outside of the company. Fundamental study on MEMS device started.
1995年
Si DRIE equipment released.
●Equipment development
SPP Technologies Co., Ltd.
1998年
Compact accelerometers were launched.
●Device development
Sumitomo Precision Products
1999年
After establishing a joint venture with BAE Systems in the UK for the manufacture and sale of MEMS gyroscopic devices, our company functions as a MEMS foundry.
● MEMS Foundry (Manufacturing)
2009年
Launch of inertial system attitude angle detector (AMU)
MEMS Infinity Division
Applied products (sensors) business
2023年
Establishment of new organization MEMS∞(infinity)
Started a business that responds to customer requests while evolving MEMS technology
MEMS Infinity Division
Foundry Business (Overall Manager)
Sumitomo Precision Products Co., Ltd.
https://www.spp.co.jp/Sumitomo Precision Products Group (SPP) offers comprehensive solutions based on its unique precision technology and manufacturing in a variety of fields, including aircraft equipment, heat exchangers, hydraulic controls, ozone generators, semiconductor manufacturing equipment, and motion sensors.
Related Divisions
MEMS Infinity Division
Applied products (sensors) business
Sumitomo Precision Products is ahead of the rest of the industry in developing and manufacturing MEMS, and mass producing sensor application systems. It has achieved high precision and is already used for attitude control of space rockets and guidance control for route navigation.
Affiliated Companies
Silicon Sensing Systems Japan,
Ltd.
Silicon Sensing Systems Ltd. is a joint venture between Sumitomo Precision Products Co., Ltd. and Collins Aerospace, which develops, manufactures, and sells acceleration sensors, gyroscopes, and IMUs.
SPP Technologies Co., Ltd.
https://www.sptcorp.comSPP Technologies Co., Ltd. is a 100% subsidiary of Sumitomo Precision Products Co., Ltd.
It is a semiconductor manufacturing equipment manufacturer having a top-class market share in both domestically and internationally and it develops, manufactures, imports, and sells MEMS and semiconductor-related device manufacturing equipment (namely, dry process equipment).
1-10 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
+81-6-6482-8811
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