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Toward a promising future

Our company possesses development and product deployment technologies that cover every stage of MEMS device design, prototyping, and mass production, and our key feature is our ability to realize product development in a one-stop manner. As a MEMS foundry, we provide services from sputter deposition to device processing based on PZT thin films, for which we have a proven track record of mass production. Furthermore, in Si deep etching (DRIE), we achieve world-class high selectivity and high etch rates while optimizing perpendicularity, sidewall roughness, and CD loss.
Furthermore, we thoroughly implement quality control based on ISO 9001 certification in providing these technologies, ensuring that our customers' projects are supported with reliable quality.


MEMS Device Design

MEMS Device Design

Designed with mass production in mind, tailored to specific applications and requirements.
Device structure and process design

We provide development support to bring our customers' product ideas to life, from structural design and simulation to process design of MEMS devices.

MEMS Foundry Development

MEMS Foundry Development

Support for MEMS prototyping and process development

We support prototyping and small-batch development, including process condition verification and optimization. We assist development with mass production in mind.

MEMS Foundry Mass Production

MEMS Foundry Mass Production

A fully integrated system from MEMS manufacturing to mass production.

Our established MEMS manufacturing processes ensure consistent quality and support for mass production. We can handle everything from small-lot production to full-scale mass production.

Business History

1992年

MEMS Manufacturing equipment, IX200 on sale.
Customer Lab established.
IX200 were supplied for MEMS development inside and outside of the company. Fundamental study on MEMS device started.

1995年


Si DRIE equipment released.

Equipment development
 SPP Technologies Co., Ltd.

1998年

Compact accelerometers were launched.

Device development
Sumitomo Precision Products

1999年

After establishing a joint venture with BAE Systems in the UK for the manufacture and sale of MEMS gyroscopic devices, our company functions as a MEMS foundry.

MEMS Foundry (Manufacturing)

2009年

Launch of inertial system attitude angle detector (AMU)

MEMS Infinity Division
Applied products (sensors) business

2023年

Establishment of new organization MEMS∞(infinity)
Started a business that responds to customer requests while evolving MEMS technology

MEMS Infinity Division
Foundry Business (Overall Manager)

Sumitomo Precision Products Co., Ltd.

https://www.spp.co.jp/

Sumitomo Precision Products Group (SPP) offers comprehensive solutions based on its unique precision technology and manufacturing in a variety of fields, including aircraft equipment, heat exchangers, hydraulic controls, ozone generators, semiconductor manufacturing equipment, and motion sensors.

Related Divisions

MEMS Infinity Division
Applied products (sensors) business

https://www.spp.co.jp/mems/

Sumitomo Precision Products is ahead of the rest of the industry in developing and manufacturing MEMS, and mass producing sensor application systems. It has achieved high precision and is already used for attitude control of space rockets and guidance control for route navigation.

Affiliated Companies

Silicon Sensing Systems Japan,
Ltd.

https://siliconsensing.com/ja

Silicon Sensing Systems Ltd. is a joint venture between Sumitomo Precision Products Co., Ltd. and Collins Aerospace, which develops, manufactures, and sells acceleration sensors, gyroscopes, and IMUs.

SPP Technologies Co., Ltd.

https://www.sptcorp.com

SPP Technologies Co., Ltd. is a 100% subsidiary of Sumitomo Precision Products Co., Ltd.
It is a semiconductor manufacturing equipment manufacturer having a top-class market share in both domestically and internationally and it develops, manufactures, imports, and sells MEMS and semiconductor-related device manufacturing equipment (namely, dry process equipment).

AccessLocation

住友精密工業株式会社 MEMS

1-10 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan

電話+81-6-6482-8811