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Foundry Mass Production

MEMS Foundry Mass Production

About MEMS Foundry Mass Production

MEMS foundry mass production involves continuously manufacturing MEMS devices established during the research and development phase while maintaining stable quality and reproducibility.
Because MEMS devices have intricate structures and involve numerous manufacturing processes, MEMS manufacturing design that is geared towards mass production is essential.
Our company provides MEMS foundry mass production services that cover everything from the initial stages to the mass production phase.
We provide seamless support from prototyping to full-scale MEMS mass production.

We provide comprehensive support from MEMS manufacturing processes to mass production.

MEMS manufacturing involves a complex interplay of multiple processes, including film deposition, lithography, etching, and bonding.
As a MEMS foundry, it is crucial not only to optimize each process individually, but also to design a total process that takes into account yield and reproducibility during mass production.
Our MEMS foundry service provides comprehensive support from the construction of MEMS manufacturing processes to the start of mass production.
We will ensure that the results obtained during the development phase are successfully translated into mass production of MEMS devices.

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Process design and manufacturing system for mass production of MEMS

In mass production of MEMS, while increasing the number of units manufactured, stable production with minimal variation in quality is required.
Therefore, optimizing process conditions from the initial stages with mass production in mind is essential.
Our company has established a MEMS foundry mass production system utilizing an 8-inch (200mm) line.
We provide comprehensive support, including process control, quality control, and reproducibility evaluation, all necessary for mass production.

Quality Assurance System

Unlike traditional semiconductor devices, MEMS have mechanical elements within microstructures, so it is important to measure the behavior of dynamic mechanical systems through reliability and durability tests.
By organizing the procedures and processes from product planning and development through mass production from a quality assurance perspective, we gain a high level of trust from our customers and ensure a high degree of mutual understanding in all processes.

Support for transitioning to MEMS mass production, starting with low-risk small-batch production.

Many companies experience risks and anxieties in the initial stages of transitioning to large-scale mass production in the future.
Therefore, our company will gradually expand production scale while confirming mass production feasibility and quality through small-lot startups.
We are adopting an approach that allows for a smooth transition to full-scale mass production.
Furthermore, by handling design, simulation, prototype evaluation, and mass production planning within the same organization, rework during the mass production stage is minimized.
We have minimized redesign and achieved a smooth transition to full-scale mass production.

A MEMS foundry that handles everything from research and development to mass production.

Our MEMS foundry plays the role of a long-term partner, looking beyond prototyping for research and development purposes to the mass production phase.
We provide optimal manufacturing conditions and process proposals for each stage, including MEMS manufacturing, MEMS mass production, and MEMS small-lot mass production, and offer comprehensive support from device development to mass production.

Strengths of MEMS manufacturing and foundry services based on mass production experience

Leveraging the know-how accumulated through our mass production track record, we provide foundry services that prioritize stability and reliability in MEMS manufacturing.
We have the necessary equipment, processes, and quality control systems in place for mass production of MEMS devices, ensuring reliable support for our customers' MEMS device mass production.

Example: Inkjet head
Example: Silicone microphone
Example: Power devices
Example: Accelerometer
Example: Gyroscope sensor
Example: MEMS optical switch

Our mass production process

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Development

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