Why Us
Why Partner with Us
In MEMS implementation and development, challenges such as "the design is viable but doesn't lead to mass production" and "difficulty in selecting a development outsourcing partner" tend to become apparent.
Our company has established a one-stop MEMS support system that can handle all aspects of MEMS design, prototyping, and mass production.
Leveraging our world-class track record in technological development and high level of expertise, we provide comprehensive MEMS support from initial consideration to mass production launch.
Furthermore, we have established a system that takes into account the quality, reproducibility, and stable supply required in the mass production phase.
When considering MEMS implementation or MEMS development for the first time, it's not uncommon to feel anxious not only about the technical aspects but also about the process and organizational structure.
At our company, we provide MEMS support to customers considering outsourcing MEMS development, guiding them from the planning stage to mass production launch and continuous production phases.
The performance requirements for MEMS devices vary greatly depending on their application.
Our company has supported the realization of high-performance MEMS by conducting design and process studies according to the required specifications.
Our strength lies in our ability to provide technical proposals that go beyond just the development phase and consider the entire process up to the mass production phase.
In the mass production of MEMS devices, it is common to gradually transition to mass production in small batches while conducting repeated verification, rather than proceeding to large-scale mass production from the outset.
At our company, we have established a system that can handle small-volume production, while also designing our production processes with a view to a smooth transition to medium- and mass production phases in the future.
Our strength lies in our ability to scale up smoothly in line with our clients' business growth.
Because the design, prototyping, and mass production of MEMS devices are closely intertwined, considering each process in isolation can easily lead to rework and unexpected problems.
By providing comprehensive support for MEMS device design, MEMS foundry development, and MEMS foundry mass production, we have created a development system that seamlessly connects the initial stages to mass production.
The ability to handle everything from design to mass production is possible because we possess two core technologies within our own group: PZT piezoelectric thin film process and Si deep etching (Si DRIE).
All of these are backed by many years of mass production experience, and our ability to ensure stable reproducibility and quality from the prototype stage is a unique strength of our company.
Based on the PZT thin film, which has a proven track record in mass production, used in the CRM/CMS series of gyroscopes developed by our company and mass-produced and sold by our affiliate, Silicon Sensing Systems Ltd.
We provide services tailored to our customers' needs, from thin-film deposition to MEMS device fabrication.
While maintaining the characteristics of the PZT film, we have adopted an ALD film to ensure long-term reliability, which is an issue for MEMS actuators.
Using Predeus, manufactured by SPP Technologies Co., Ltd., a Sumitomo Precision Products group company with a proven track record in mass production of MEMS devices, we optimize verticality, sidewall roughness, and CD loss.
We offer world-class high selectivity and high etch rates, enabling us to perform highly challenging machining operations.
Two-stage processing
Tapered
High aspect
Pillar processing
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