Si DRIE Technology
Advanced Silicon Processing
Our company launched the world's first practical Si deep excavation equipment in 2005.
We have the technology to provide highly accurate and difficult Si etching.
Deep Si Etching Mechanism
(Si DRIE: Bosch Process)
The Bosch process "Bosch-Process" was developed in 1992 by Robert Bosch GmbH in Germany.
This is a switching etching method that repeatedly performs etching and passivation (forming a sidewall protective film).
We use various equipment from our group company SPP Technologies.
Using advanced technology, we can handle equipment with improved processing accuracy and productivity for various purposes from research prototyping to mass production.
Evolution of Si DRIE Process
Etch rates have been significantly improved by improving the functionality of our in-house developed equipment.
The shape controllability of the in-house developed equipment has been improved, and stable shapes can be reproduced even during deep etching.
Up to 3mm from the edge of 200mm wafer: Stable control of tilt angles within 0.1° or less
Up to 3mm from the edge of 200mm wafer:
Stable control of tilt angles within 0.1° or less