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Design

Device Design

Design

MEMS Device DesignDesign

We provide development support from the design stage of MEMS devices to turn product ideas into reality.
Our comprehensive services span from device design to simulation.
Through development at our fab and collaboration with university and research institutions, we deliver high-value solutions.

01多様なMEMS特有のプロセスへの対応 02対応力の高い研究・開発環境 03最終的な製品化までを見据えたデバイス設計

MEMS Device Design Process

MEMS Device Design Process

We handle the earliest device designs in-house, from structural design to prototype production.
We have also formed a partnership withAMFitzgeraldwhich is based in the United States, and have established a system to solve advanced problems.

[Reference] AMFitzgerald, which is building a partnership with our company

Structural Design/Simulation

We listen to the customer's requests and support development from the initial structural design. By performing model analysis using FEM (finite element method), we can analyze the behavior of each material against load, vibration, and heat, and derive the optimal structure.

Structural Design/Simulation

Example of model analysis using FEM

Calculation accuracy can be improved by subdividing multiple elements in a structure and adding each contact point and intermediate contacts between them. By performing strength analysis and vibration analysis, it is possible to identify problems at the design stage in order to realize the product.

Process Design/Prototype Production

After simulation, we design the device and its fabrication process.
We repeat the process of piezoelectric element formation, film deposition, dry etching, and wet etching to create a prototype MEMS device.

プロセス設計・プロトタイプ試作
ウエハ調整・洗浄・熱酸化膜生成
レジスト塗布成膜
パターン露光・現像
エッチング
中空構造の形成
プロセス完了

Our Development Environment

Since we have in-house equipment for developing various MEMS devices, we are able to develop prototypes under centralized management.

mounting machine

probe Station

cantilever evaluation

XRD

Development Example

technology electromagnetic electrostatic piezoelectric Others
Sensor
design example
electromagnetic sensor

electromagnetic sensor

electrostatic sensor

electrostatic sensor

piezoelectric sensor

piezoelectric sensor

Pyroelectric sensor

Pyroelectric sensor

Actuator
design example
電磁式アクチュエータ

electromagnetic actuator

静電式アクチュエータ

electrostatic actuator

圧電式アクチュエータ

piezoelectric actuator

熱式アクチュエータ

thermal actuator